How Does Rotary Magnetron sputtering Target Work?

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How Does Rotary Magnetron Sputtering Target Work?

1. What is rotary magnetron sputtering target?2. How does rotary magnetron sputtering target work?1. In the process of thin film deposition, rotary magnetron sputtering target is a special type of target used for depositing thin films onto substrates. It is made of the material that needs to be sputtered onto the substrate, such as metals or ceramics.2. Rotary magnetron sputtering target works by using a magnetron sputtering system, which consists of a vacuum chamber, a target, and a substrate. Firstly, the vacuum chamber is evacuated to create a low-pressure environment. Then, the target material is bombarded with high-energy ions, which causes atoms to be ejected from the target surface. These atoms then travel across the vacuum chamber and deposit onto the substrate, forming a thin film.The rotary motion of the magnetron sputtering target helps to ensure a more uniform erosion of the target material, resulting in a more even deposition of the thin film onto the substrate. This rotation also helps to increase the target's lifespan by distributing the erosion evenly over the target surface.Overall, rotary magnetron sputtering target is an efficient and effective method for depositing thin films with high precision and control, making it a popular choice in various industries such as electronics, optics, and aerospace.

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